Lesker PVD75 #1 Sputter Deposition
Lesker PVD75 #1 Sputter Deposition
Kurt J Lesker - PVD75
NCI-SW
Arizona State University
ASU NanoFab
- Thin Film Processing
- Metal
- Sputter
Description
Thin film sputter deposition
Maximum Substrate Size
6 inch
Comments
Metal or dielectric thin films