LEO 1530 FE-SEM
LEO 1530 FE-SEM
Zeiss - LEO 1530
SENIC
Georgia Tech
Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
- Imaging
- All Imaging
- SEM
Description
The LEO 1530 FE-SEM is a hi-resolution SEM capable of sub-nanometer resolution. Detectors: In-Lens, SE, and BSE -capable of up to 6" wafer -operational voltage 0.2-30kV -low voltage for viewing non-conductive samples -x/y/z axes motorized stage
Maximum Substrate Size
6 inch