Kurt J. Lesker PVD E-beam Evaporator
Kurt J. Lesker PVD E-beam Evaporator
Kurt J. Lesker
TNF
University of Texas at Austin
Microelectronics Research Center (MRC)
- Thin Film Processing
- Metal
- Evaporation
Description
6 pockets, metal deposition
Restrictions
Metals
Maximum Substrate Size
8 inch