Kobelco Photocurrent Measurement System
Kobelco Photocurrent Measurement System
Kobelco - LTA-1620SP
SDNI
University of California, San Diego
CMRR Materials Characterization Facility
- Metrology/Characterization
- Structure or Device
- Electrical
Description
Can measure the shape of a wafer through bow and warp parameters by using line and spiral scanning to obtain thickness and topography profiles through capacitance methods.
Restrictions
Samples up to 300mm