KLA-Tencor P-7 Surface Profilometer
KLA-Tencor P-7 Surface Profilometer
KLA-Tencor - P70389982-00
SHyNE Resource
The University of Chicago
Pritzker Nanofabrication Facility (PNF)
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
The KLA-Tencor P-7 Surface Profilometer is a research grade stylus profiler for surface metrology and measurement. The KLA-Tencor P-7 is software equipped with parameters for a wide range of measurements including depth, step height, roughness, waviness, slop, flatness, distance, bearing ratio, radius of curvature, and more.
Maximum Substrate Size
6 inch