KLA-Tencor P-7 Stylus Profilometer
KLA-Tencor P-7 Stylus Profilometer
KLA-Tencor - P16
MiNIC
University of Minnesota-Twin Cities
Minnesota Nano Center
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
Used to measure the substrate's surface profile. Contact is made with the stylus to measure step height, surface roughness, and curvature. Vertical range of 25 nm, for certain substrates, and up to 327 µm.
Maximum Substrate Size
6 inch