KLA-Tencor P-16 Stylus Profilometer
KLA-Tencor P-16 Stylus Profilometer
Tencor/KLA - P16
MiNIC
University of Minnesota-Twin Cities
Minnesota Nano Center
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
Stylus Profilometer for step height and thin film thickness/texture measurements
Maximum Substrate Size
8 inch