KLA-Tencor P-10 Profilometer
KLA-Tencor P-10 Profilometer
KLA-Tencor - P-10
SENIC
Joint School of Nanoscience and Nanoengineering
Joint School of Nanoscience and Nanoengineering
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
This tool can measure vertical features ranging from under 100 (0.4 min.) to approximately 300 m (11 mils), with a vertical resolution of 0.5, 2, or 10.
Maximum Substrate Size
8 inch