KLA 3D Profilometer (MET-02)

The P-7 stylus profiler offers industry leading measurement repeatability for reliable measurement performance. The surface measurement system has 150 mm scan length standard the only stylus profiler on the market to offer long scan capability without the need for stitching. The UltraLite sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a surface measurement system. This surface measurement system includes point-and-click operation and the productivity package to offer the easiest to use tool on the market with the features required by university, R&D, and production environments.
The P-7 Stylus profiler is capable of addressing a wide range of surface measurements and applications:
Thin film step height measurements
Thick film step height measurements
Photo resist / soft films
Etched trench depth
Materials characterization for surface roughness and waviness
Surface curvature and form
2D stress of thin films
Dimensional analysis and surface texture
3D imaging of various surfaces
Flatness or curvature
Defect review and defect analysis