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Keyence VK-X series 3D Laser Scanning Confocal Microscope

Keyence VK-X series 3D Laser Scanning Confocal Microscope

Keyence - VK-X

nano@stanford Stanford University Stanford Nano Shared Facilities
  • Metrology/Characterization
    • Thin Film
      • Other
Description
The Keyence VK-X Series 3D Laser Scanning Confocal Microscope provides non-contact, nanometer-level profile, roughness, and film thickness data on any material. The lateral resolution of the microscope is 120 nm using the 408 nm Violet laser light. The microscope scans the surface using a 16-bit photomultiplier to receive the reflected laser light. The instrument is able to provide highly accurate 3D measurement data over any shape of materials and steep angles (up to 88 Degree angle of detection). High-resolution optical images can be acquired with resolutions up to 21.6 million pixels through 3CCD pixel shifting technology. High dynamic range (16-bit resolution color gradation) function automatically recognizes bright and dark areas as well as low contrast areas.
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