JXA-8530F Electron Probe Microanalyzer (EPMA)

The JXA-8530F Electron Probe Microanalyzer (EPMA) is JEOLs newest Hyperprobe. The strength of the JXA-8530F is its analytical capabilities. It is primarily used for the identification of constituent elements in a specimen and the study of their distribution. Analyses are performed by illuminating the specimen surface with a finely focused electron beam and measuring the wavelengths and intensities of characteristic X-rays emitted from the specimen. The EPMA is capable of wide-range elemental analysis and observation from ultramicro-areas on the surface without destroying the specimen.