JEOL 6500 Field Emission Gun
JEOL 6500 Field Emission Gun
JEOL - JEOL 6500
MiNIC
University of Minnesota-Twin Cities
Characterization Facility (CharFac)
- Imaging
- All Imaging
- SEM
Description
High resolution secondary electron imaging; backscatter electron imaging; energy dispersive spectroscopy; electron backscatter diffraction; and cathodoluminescence; Accelerating voltage from 0.5 to 30 kV; Lateral resolution of 1.5 nm; Magnification ranges from 10 X to 400,000X; Sample size: 50 x 125 x 125 mm; Chemical analysis of bulk samples with elements as low as sodium available using a Thermo-Noran Vantage system; Cathodoluminescence analysis with a Gatan (Oxford) MonoCL 2 system; Crystallographic analysis with an EBSD system from HKL allowing pattern indexing and texture mapping with Channel 5 software.
Maximum Substrate Size
5 inch