J.A. Woollam M-2000D Spectroscopic Ellipsometer
J.A. Woollam M-2000D Spectroscopic Ellipsometer
J. A. Woollam - M-2000D
SDNI
University of California, San Diego
Nano3 Cleanroom Facility
- Metrology/Characterization
- Thin Film
- Thickness
- Structure or Device
- Optical
Description
The J.A. Woollam M-2000D spectroscopic ellipsometer is a powerful and versatile tool for thin film characterization. It uses patented RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision. It has 500 wavelengths in the range of 193-1000 nm, fast data acquisition speed, and mapping capability. Angle of Incidence can be changed from 45°-90° (with Automated Angle Base), maximum substrate thickness is 18 mm.
Maximum Substrate Size
8 inch