IPG Photonics IX-255
IPG Photonics IX-255
IPG Photonics - IX-255
MANTH
University of Pennsylvania
Singh Center for Nanotechnology
- Patterning
- All Patterning
- Laser
Description
A highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV laser, tool shape selector and software for complex automation sequences.
Applications
Micro Drilling
Annealing
Thin-film Removal
Laser Lift-off (LLO)
Dicing
Features
Pre-set Configurations for High Fluence and Large Field of View Applications
Selectable Beam Shapes for Automated, Complex Micromachining
Precision Stages with <3 _m Motion Control Accuracy
Dual Magnification Vision System with Sub-micron Part Alignment
193 nm Laser
Linear Mask Changer for Complex Features and Shapes
Applications
Micro Drilling
Annealing
Thin-film Removal
Laser Lift-off (LLO)
Dicing
Features
Pre-set Configurations for High Fluence and Large Field of View Applications
Selectable Beam Shapes for Automated, Complex Micromachining
Precision Stages with <3 _m Motion Control Accuracy
Dual Magnification Vision System with Sub-micron Part Alignment
193 nm Laser
Linear Mask Changer for Complex Features and Shapes
Maximum Substrate Size
8 inch