Imaging XPS

The X-ray photoelectron spectroscopy (XPS) imaging system provides fast, uantitative, real-time parallel imaging with highest resolution spectroscopy at all analysis areas. In addition, the system is equipped with temperature programmed desorption (TPD), ultraviolet photoelectron spectroscopy (UPS), ion scattering spectroscopy (ISS), a cluster/Ar+ ion gun, and a five-axis automated stage with variable temperature sample environment at the analysis chamber. The system is also integrated with a radial distribution chamber (RDC), a full-size glove box, and a cold-stage at the sample introduction for air-sensitive, liquid-semisolid, biological and environmental sample transfers. In addition, the RDC has a simple sample transfer mechanism to theanalysis position from multiple ports where, in the future, catalysis chambers equipped with Raman and IR spectrometers, deposition sources, and reactive gas manifolds for in-situ processing and characterization will be attached.