Hitachi SU8010 SEM
Hitachi SU8010 SEM
Hitachi - SU8010
SENIC
Georgia Tech
Materials Characterization Facility
- Imaging
- All Imaging
- SEM
Description
1.0nm resolution( Secondary electron detector) at 15 kV and 1.3 nm at 1 kV. 2.0nm resolution (Backscattered electron detector) at 15KV . Operating voltage range 100 V 30 kV High resolution image grabber up to 5120X3840 pixels. Ultra-clean vacuum system with a turbo pump and an oil free dry-scroll pump. A stationary anti-contamination trap reduce the re-deposition of hydrocarbons onto the sample surface