Hitachi S-3700N VP-SEM
Hitachi S-3700N VP-SEM
Hitachi - S-3700N
SENIC
Georgia Tech
Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
- Imaging
- All Imaging
- SEM
Description
The Hitachi S-3700N Variable Pressure SEM features a low vacuum observation of 6270 Pa (7mT-2Torr) which enables imaging of non-conductive samples (dielectrics) and wet/moist samples such as cultured cells, without traditional sample preparation (gold coating/drying). A Deben Coolstage controls sample temperature between -10F and 120F to control sample vapor pressure.
-Magnification range: x5 x300,000
-Resolution @ 30kV (SE in High Vacuum Mode): 3nm
-Resolution @ 30kV (BSE in 6Pa Low Vacuum Mode): 4nm
-Magnification range: x5 x300,000
-Resolution @ 30kV (SE in High Vacuum Mode): 3nm
-Resolution @ 30kV (BSE in 6Pa Low Vacuum Mode): 4nm