Heidelberg µP-101 Direct Write Lithography

The Heidelberg Instruments µPG 101 is a direct write lithography system equipped with a 375 nm ultraviolet diode laser capable of exposing feature sizes down to 0.8 µm on either positive or negative photoresists on samples sizes of 10 mm x 10 mm up to 5” x 5”. In addition to full exposure, it has the ability to create surface topographies for gray scale applications.