Hamatech Wafer Processor Develop 1
Hamatech Wafer Processor Develop 1
Hamatech - HMR900/HMP900
CNF
Cornell University
Cornell NanoScale Science & Technology Facility (CNF)
- Etching
- Wet
- Other
Description
The CNF has two Hamatech-Steag wafer processors for developing of wafers. Spray and puddle processes are available with wafer chucks for 3 inch, 100 mm, and 150 mm wafers. Standard developers are available on each tool.
Maximum Substrate Size
6 inch