FMS Thin Film Stress Measurement System
FMS Thin Film Stress Measurement System
Bid Service - FSM 500TC
SHyNE Resource
The University of Chicago
Pritzker Nanofabrication Facility (PNF)
- Metrology/Characterization
- Thin Film
- Mechanical
Description
The FMS Thin Film Stress Measurement System is used to test the stress of different films and substrates. It can also test the coefficient of thermal expansion (CTE) of films.
Maximum Substrate Size
8 inch