FilMetrics F40

The Filmetrics systems are wavelength scanning fiber optic reflectometers, allowing measurement of film thickness if the optical constants are known. The F40 system is attached to a microscope for film thickness measurement from 20 nm to 20 microns with a measurement spot size ranging from 100 to 10 microns square. The use of the microscope allows you to make measurements on specific features of your pattern devices.