FIB/SEM: FEI Helios 600i

FIB/SEM: FEI Helios 600i

FEI - NanoLab 600i

nano@stanford Stanford University Stanford Nano Shared Facilities
  • Imaging
    • All Imaging
      • FIB
Description
The instrument is an FEI Helios NanoLab 600i DualBeam FIB/SEM, containing both a focused Ga+ ion beam ("Tomahawk") and a high resolution field emission scanning electron ("Elstar") column. Combined with advances in patterning, scripting, and a suite of accessories, these features make milling, imaging, analysis, and sample preparation down to the nanoscale possible as standard applications in the lab.
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