EMS Hotplate
EMS Hotplate
Electronic Micro Systems Ltd. - EMS 1000-1
MONT
Montana State University
Montana Microfabrication Facility (MMF)
- Lithography
- All Lithography
- Resist Processing
Description
A hotplate for round substrates up to 6" with vacuum hold down. Temperature control from ambient to 250C using a watlow programmable controller.
Maximum Substrate Size
6 inch