Emitech K575X Sputter Coater
Emitech K575X Sputter Coater
Emitech - K575X
SDNI
University of California, San Diego
Nano3 Cleanroom Facility
- Thin Film Processing
- All Thin Film Processing
- Sputter
Description
Sputter coat non-conducting samples with Cr or Ir prior to SEM analysis. Turbo pump and Peltier cooled sputtering provide fine grain metal deposition desgined for FESEM analysis. One touch operation.
Maximum Substrate Size
2 inch