Ellipsometer
Ellipsometer
Woollam - M-2000 Spectroscopic Ellipsometer
NNI
University of Washington
Molecular Analysis Facility (MAF)
- Metrology/Characterization
- Thin Film
- Thickness
Description
Ellipsometry is used for determination of thicknesses and optical parameters of thin films and multilayers. The M-2000 Spectroscopic Ellipsometer is the perfect combination of speed and accuracy. Measurements covering the entire spectral range from deep ultraviolet to near infrared are accomplished in secondsmaking the M-2000 ideal for a wide range of applications.
Specifications:
Spectral Range: 210-1700 nm
Scan Speed: < 10 s for collection of entire spectral range
Spot Size: Normal > 1.5 mm, Focused <150 m
Sample mapping 150X150 mm
Sample Alignment: Automated
Imaging: Integrated CCD camera
Heating Option: Room temp to 300 *C
Specifications:
Spectral Range: 210-1700 nm
Scan Speed: < 10 s for collection of entire spectral range
Spot Size: Normal > 1.5 mm, Focused <150 m
Sample mapping 150X150 mm
Sample Alignment: Automated
Imaging: Integrated CCD camera
Heating Option: Room temp to 300 *C