Ellipsometer
Ellipsometer
J. A. Woollam - M-2000U
SHyNE Resource
Northwestern University
Northwestern University Atomic and Nanoscale Characterization Experimental Center (NUANCE)
- Metrology/Characterization
- Thin Film
- Other
Description
Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) and film thickness of thin films. Ellipsometry measures the change of polarization upon reflection or transmission and compares it to a model.
Restrictions
film less than 10 um