Ellipsometer
Ellipsometer
J.A. Woollam - V-VASE
RTNN
University of North Carolina
Chapel Hill Analytical and Nanofabrication Laboratory (CHANL)
- Metrology/Characterization
- Thin Film
- Spectroscopy
Description
Allows a very precise determination of film thicknesses when the optical constants of the films are known. Total spectral range of 250-2300 nm. 250-1700 nm at angles 20 to 90; 1700-2300 nm at angles 35 to 90. Focusing optics are available to reduce the beam size to 100 mm for wavelengths between 250-1700 nm and angles between 20-90.