Denton Discovery 635 Sputter System
Denton Discovery 635 Sputter System
Denton Vacuum - Discovery 635
SDNI
University of California, San Diego
Nano3 Cleanroom Facility
- Thin Film Processing
- Metal
- Sputter
Description
The Denton Discovery 635 is a three cathode (one RF, two DC) sputter system for deposition of metals and dielectrics. The system is capable of RF bias for pre-deposition cleaning and descum. Stage can heat up to 450C. Nano3 supplies a wide variety of sputter targets for use. Available process gases: Ar, O2, N2.
Maximum Substrate Size
6 inch