DektakXT
DektakXT
Bruker - DektakXT
SHyNE Resource
The University of Chicago
Pritzker Nanofabrication Facility (PNF)
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
The DektakXT stylus contact profilometer is the latest surface profiler with high vertical resolution (5nm) with large X/Y scan range for 2d and 3d surface analysis. It is an all-purpose step-height measurement tool for film thickness and etch-depth
Maximum Substrate Size
6 inch