Dektak 150
Dektak 150
Bruker - Dektak 150
SDNI
University of California, San Diego
Nano3 Cleanroom Facility
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
The Dektak 150 surface profiler is an advanced thin and thick film step height measurement tool capable of measuring steps below 100. It also measures samples up to six inches in dimension and up to four inches thick. The Dektak 150 can be used to profile surface topography and waviness, as well as to measure surface roughness in the nanometer range. The system provides a step-height repeatability of 0.6 nm (6.) The system is equipped with single-axis 4-inch Y auto stage that enables the mapping of 3D images.
Maximum Substrate Size
6 inch