DC Probe Station and Electronics

A Cascade Summit 12K probe station with 8-inch chuck is available for DC wafer probing. The system includes four high-precision Cascade 208 and 210 DC probe positioners with Kelvin probes, microscope, digital camera, and is coupled with a Temptronic TPO3000 ThermoChuck system with -50 to 200 °C chuck temperature control capability. An Agilent 4156C precision semiconductor parameter analyzer with four high-resolution source measurement units (HRSMU) with ±100 V max, one high-power source measurement units (HPSMU) with ±200 V max, and an Agilent 4294A precision Impedance analyzer are available and are controlled by a PC with Keysight ICCAP software.