CV Testing Station

Keithley/Everbeing - 4200A

CNF Cornell University Cornell NanoScale Science & Technology Facility (CNF)

Metrology/Characterization
- Structure or Device
  - Electrical

Description

A Keithley C-V measurement system is coupled to the Everbeing Probe station and an Everbeing hot chuck capable of 300°C. The entire system is controlled by user-friendly PC software. Both high frequency and quasi-static measurements are available. Other measurements such as bias-temperature and zerbst C-t plots are also available.

Maximum Substrate Size

6 inch