CHA Mark 50 Evaporator
CHA Mark 50 Evaporator
CHA - Mark 50
CNF
Cornell University
Cornell NanoScale Science & Technology Facility (CNF)
- Thin Film Processing
- Metal
- Evaporation
Description
The large chamber on this electron beam evaporator enables users to deposit metals on moderately sized production runs. The tool is capable of conformal evaporation on 4 and 6 inch wafers and has liftoff platens for 4, 6 and 8 inch wafers.
Maximum Substrate Size
8 inch