CHA E-beam Evaporator
CHA E-beam Evaporator
CHA Industries - SE-1000-RAP
TNF
University of Texas at Austin
Microelectronics Research Center (MRC)
- Thin Film Processing
- Metal
- Evaporation
Description
4, 25cc pockets. heating lamps (200C); Process pressure 4x10-6 Torr. Quartz crystal for thickness deposition control
Maximum Substrate Size
6 inch