CDE ResMap Resistivity 4-pt Probe
CDE ResMap Resistivity 4-pt Probe
Creative Design Engineering (CDE) - 178
CNF
Cornell University
Cornell NanoScale Science & Technology Facility (CNF)
- Metrology/Characterization
- Structure or Device
- Electrical
Description
An automated 4 point probe system for measuring thin film sheet resistivity, both single point and multipoint wafer mapping.
Maximum Substrate Size
8 inch