CDE ResMap-178
CDE ResMap-178
CDE Inc. - ResMap 178
CNS
Harvard University
Center for Nanoscale Systems (CNS)
- Metrology/Characterization
- Structure or Device
- Electrical
Description
CDE 4 point probe (4pp) ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). As a commonly used metrology unit in nanofabrication processes to characterize the thin film electrical properties, the tools capabilities include:
1) Sample size: 10mm to 150mm in diameter
2) Measurement range, 5m_ to 5 M_
3) Accuracy: within 1%
4) Software: easy to use, mapping capability (2D and 3D contour)
5) Fast measurement and easy operation
1) Sample size: 10mm to 150mm in diameter
2) Measurement range, 5m_ to 5 M_
3) Accuracy: within 1%
4) Software: easy to use, mapping capability (2D and 3D contour)
5) Fast measurement and easy operation