BLE Spinner
BLE Spinner
LG Systems -
SENIC
Georgia Tech
Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
- Lithography
- All Lithography
- Resist Processing
Description
The BLE Photoresist Spinner is a spinner/hot plate combo mounted inside of a white polypropylene body. This is a fully manual spinner accustomed for use with 4 or 6 wafers (or pieces mounted on a 4 carrier) only. This spinner is self-exhausted and has readily available workspace and a programmable hotplate.
Maximum Substrate Size
6 inch