Black Magic PECVD

Aixtron -

SENIC Georgia Tech Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility

Thin Film Processing
- Dielectric
  - PECVD

Description

Black Magic PECVD is Plasma-Enhanced Chemical Vapor Deposition (PECVD) equipment for deposition of high quality carbon nanotube (CNT), carbon nanoribbon (CNR) and graphene thin films.
Specifications:
Single-Wall, multi-wall CNT, CNR
Low temperature growth
Super growth of CNT

Maximum Substrate Size

4 inch

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