ATV PEO 603
ATV PEO 603
ATV Technologie - PEO 603
MONT
Montana State University
Montana Microfabrication Facility (MMF)
- Thin Film Processing
- Dielectric
- Oxidation
Description
The ATV is a tube furnace that can be used for oxidation, doping and anneals. Process in-liners are used for sensitive processes to prevent cross contamination. Currently the system can support wet/dry oxdation and annealing of 4" wafers and pieces.
Low pressure processing is supported as well.
Low pressure processing is supported as well.
Maximum Substrate Size
4 inch