AP-XPS/AP-STM
AP-XPS/AP-STM
SPECS - PVD75
NNI
Oregon State University
Ambient Pressure Surface Characterization Laboratory (APSCL)
- Metrology/Characterization
- Thin Film
- XPS
- Imaging
- All Imaging
- Probe
Description
XPS can be performed between 25 to <1 x 10-9 mbar and between 120-1073 K. STM can be performed between 100 to <1 x 10-9 mbar and between 220-773 K. A preparation chamber is attached which has a four pocket e-beam evaporator and low energy electron diffraction.
Substrate 1 cm x 1 cm.
Substrate 1 cm x 1 cm.