Annealsys Rapid Thermal Processor
Annealsys Rapid Thermal Processor
Annealsys - AS-One
RTNN
North Carolina State University
NCSU Nanofabrication Lab (NNF)
- Thin Film Processing
- Dielectric
- RTA/RTP
Description
The annealsys AS-One 150 is a rapid thermal processing tool that will be capable of running samples from small pieces to 6” wafers, up to 1300˚C with pressure ranges from atmospheric conditions to high vacuum.