Anneal Furnace
Anneal Furnace
Expertech - CTR200
NNI
University of Washington
Washington Nanofabrication Facility (WNF)
- Thin Film Processing
- Dielectric
- Doping
Description
General purpose atmospheric tube furnace with nitrogen, oxygen, and forming gas. Used for annealing and dopant drive.
Restrictions
None
Maximum Substrate Size
8 inch