Angstrom EvoVac Electron Beam Evaporator
Angstrom EvoVac Electron Beam Evaporator
Angstrom Engineering - EVOVAC 006
SHyNE Resource
The University of Chicago
Pritzker Nanofabrication Facility (PNF)
- Thin Film Processing
- Metal
- Evaporation
Description
PVD tool which evaporates high melting point materials, such as refractory metals and ceramics, using an electron beam. The EvoVac provides multiple sources of flexibility in its deposition systemincludingresistive thermal evaporation, ion assistedand sputter deposition, as well as principal electron beamevaporation.
Maximum Substrate Size
6 inch