Anatech Resist Strip
Anatech Resist Strip
Anatech - SCE-110-RF
CNF
Cornell University
Cornell NanoScale Science & Technology Facility (CNF)
- Cleaning
- All Cleaning
- Plasma/Stripper
Description
The Anatech USA, model SCE-110-RF, Oxygen plasma Asher is a 10 inch diameter all quartz barrel asher. It is ICP powered 13.56 MHz up to 900 Watts. It is equipped for both oxygen and nitrogen plasma. It can process small pieces and up to 200 mm wafers.
Maximum Substrate Size
6 inch