Amod Evaporator

Angstrom Engineering - Amod

MONT Montana State University Montana Microfabrication Facility (MMF)

Thin Film Processing
- Metal
  - Evaporation

Description

The Amod evaporator is a computer controlled, load locked evaporation system. This tool is equiped with a 7cc, 4-pocket telemark ebeam system and two resistive sources. Each source is shuttered and has an independent crystal monitor. The system also has a glow discharge source in the main chamber and an RGA detector

Maximum Substrate Size

6 inch