AJA Orion 8 Sputter System
AJA Orion 8 Sputter System
AJA International - Orion 8
NNI
Oregon State University
Advanced Technology and Manufacturing Institute (ATAMI)
- Thin Film Processing
- Metal
- Sputter
Description
Load locked system has two 3" DC, one 3" RF and one 2" DC sputter sources. Fixed angle sputter down with substrate rotation and heating to 300 C. System runs automated deposition programs.
Maximum Substrate Size
6 inch