AET RTP

AET RTP

AET -

AET RTP
SENIC Georgia Tech Institute for Electronics and Nanotechnology Micro/Nano Fabrication Facility
  • Thin Film Processing
    • Dielectric
      • RTA/RTP
Description
Rapid thermal processors (RTP) or rapid thermal annealers (RTA) are used to rapidly heat a sample for annealing. The RTP can heat a sample to 500 degrees C in as low as five seconds and can heat samples to 1100 degrees C in as little as 20 seconds.
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