3D Optical Profiler
3D Optical Profiler
Zygo - Nerxview
SHyNE Resource
Northwestern University
Northwestern University Micro/Nano Fabrication Facility (NUFAB)
- Metrology/Characterization
- Structure or Device
- Profilometry
Description
Nexview 3D optical surface profiler excels at measuring all surfaces from supersmooth
to very rough, with sub-nanometer precision, independent of field of view.
Measurement types include flatness, roughness, large steps and segments, thin films,
and steep slopes, with feature heights ranging from < 1 nm up to 20000 m.
to very rough, with sub-nanometer precision, independent of field of view.
Measurement types include flatness, roughness, large steps and segments, thin films,
and steep slopes, with feature heights ranging from < 1 nm up to 20000 m.
Maximum Substrate Size
12 inch