Etch Processing Public Forum

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Latest Questions

Etching of ZnSe, ZnS, ZnCdSe II-VI compounds

What is the best approach to etching II-VI materials such as ZnSe, ZnS, ZnCdSe?

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Protocol for opening a chlorine based etch chamber?

Is there a suggested protocol to follow when opening a chlorine based etch chamber for maintenance?

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Metal hard masks for Bosch DRIE Si?

Should metal hard masks be used in Bosch deep silicon etch systems? Are there any consequences?

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XeF2 starting recipes?

When bringing up a new XeF2 system, are there any suggested starting parameters?

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Releasing CdS structures from Si using XeF2?

Can one release CdS structures from Si using XeF2?

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