AFM Veeco/Bruker NanoMan

AFM Veeco/Bruker NanoMan

Veeco/DI/Bruker - NanoscopeV

TNF University of Texas at Austin Microelectronics Research Center (MRC)
  • Metrology/Characterization
    • Structure or Device
      • Profilometry
Description
Roughness and Profile AFM scans (tapping, contact); TUNA and Capacitance measurements
Maximum Substrate Size
6 inch
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